====== Fe (5000) into Layer 1                   =======
        SRIM-2013.00
==================================================
      ION and final RECOIL ATOM Distributions     
 See  SRIM Outputs\TDATA.txt for calculation details
==================================================
--------------------------------------------------------------------
    Recoil/Damage Calculations made with Kinchin-Pease Estimates    
--------------------------------------------------------------------
----------------------------------------------------------------
  There are NO RECOILS unless a full TRIM calculation is made.   
----------------------------------------------------------------
See file :  SRIM Outputs\TDATA.txt   for details of calculation
 Ion    = Fe   Energy = 5000  keV
============= TARGET MATERIAL ======================================
Layer  1 : Layer 1
Layer Width =     3.E+04 A   Layer # 1- Density = 8.481E22 atoms/cm3 = 7.865 g/cm3
  Layer # 1- Fe = 100  Atomic Percent = 100  Mass Percent
====================================================================
 Total Ions calculated =1000.00
 Ion Average Range =   138.9E+02 A   Straggling =   234.9E+01 A
 Ion Lateral Range =   225.8E+01 A   Straggling =   281.4E+01 A
 Ion Radial  Range =   351.9E+01 A   Straggling =   178.6E+01 A
====================================================================
 Range Skewne- = -001.2574  &= [-(X-Rp)^3]/[N*Straggle^3]
 Range Kurtosis = 005.5539  &= [-(X-Rp)^4]/[N*Straggle^4]
 Statistical definitions above are those used in VLSI implant modelling.
====================================================================
=================================================================
  Table Distribution Units are >>>  (Atoms/cm3) / (Atoms/cm2)  <<<  
=================================================================
   DEPTH         Fe       Recoil     
   (Ang.)       Ions     Distribution
-----------  ----------  ------------
250010.E-03  0.0000E+00  0.0000E+00
500010.E-03  0.0000E+00  0.0000E+00
750010.E-03  0.0000E+00  0.0000E+00
100001.E-02  0.0000E+00  0.0000E+00
125001.E-02  0.0000E+00  0.0000E+00
150001.E-02  0.0000E+00  0.0000E+00
175001.E-02  0.0000E+00  0.0000E+00
200001.E-02  4.0000E+02  0.0000E+00
225001.E-02  0.0000E+00  0.0000E+00
250001.E-02  0.0000E+00  0.0000E+00
275001.E-02  0.0000E+00  0.0000E+00
300001.E-02  0.0000E+00  0.0000E+00
325001.E-02  4.0000E+02  0.0000E+00
350001.E-02  4.0000E+02  0.0000E+00
375001.E-02  0.0000E+00  0.0000E+00
400001.E-02  0.0000E+00  0.0000E+00
425001.E-02  4.0000E+02  0.0000E+00
450001.E-02  0.0000E+00  0.0000E+00
475001.E-02  0.0000E+00  0.0000E+00
500001.E-02  4.0000E+02  0.0000E+00
525001.E-02  0.0000E+00  0.0000E+00
550001.E-02  8.0000E+02  0.0000E+00
575001.E-02  4.0000E+02  0.0000E+00
600001.E-02  4.0000E+02  0.0000E+00
625001.E-02  8.0000E+02  0.0000E+00
650001.E-02  4.0000E+02  0.0000E+00
675001.E-02  4.0000E+02  0.0000E+00
700001.E-02  8.0000E+02  0.0000E+00
725001.E-02  2.0000E+03  0.0000E+00
750001.E-02  2.8000E+03  0.0000E+00
775001.E-02  1.6000E+03  0.0000E+00
800001.E-02  8.0000E+02  0.0000E+00
825001.E-02  1.2000E+03  0.0000E+00
850001.E-02  2.0000E+03  0.0000E+00
875001.E-02  8.0000E+02  0.0000E+00
900001.E-02  4.0000E+02  0.0000E+00
925001.E-02  4.0000E+02  0.0000E+00
950001.E-02  1.6000E+03  0.0000E+00
975001.E-02  2.4000E+03  0.0000E+00
100000.E-01  2.0000E+03  0.0000E+00
102500.E-01  2.8000E+03  0.0000E+00
105000.E-01  2.8000E+03  0.0000E+00
107500.E-01  3.2000E+03  0.0000E+00
110000.E-01  6.8000E+03  0.0000E+00
112500.E-01  4.0000E+03  0.0000E+00
115000.E-01  6.4000E+03  0.0000E+00
117500.E-01  8.4000E+03  0.0000E+00
120000.E-01  8.4000E+03  0.0000E+00
122500.E-01  9.6000E+03  0.0000E+00
125000.E-01  1.2400E+04  0.0000E+00
127500.E-01  8.0000E+03  0.0000E+00
130000.E-01  1.6400E+04  0.0000E+00
132500.E-01  1.6400E+04  0.0000E+00
135000.E-01  1.2800E+04  0.0000E+00
137500.E-01  1.8400E+04  0.0000E+00
140000.E-01  1.7200E+04  0.0000E+00
142500.E-01  2.2000E+04  0.0000E+00
145000.E-01  1.6800E+04  0.0000E+00
147500.E-01  2.4800E+04  0.0000E+00
150000.E-01  1.9600E+04  0.0000E+00
152500.E-01  1.8800E+04  0.0000E+00
155000.E-01  2.0000E+04  0.0000E+00
157500.E-01  1.6000E+04  0.0000E+00
160000.E-01  1.9200E+04  0.0000E+00
162500.E-01  1.2400E+04  0.0000E+00
165000.E-01  1.6000E+04  0.0000E+00
167500.E-01  1.1600E+04  0.0000E+00
170000.E-01  8.8000E+03  0.0000E+00
172500.E-01  6.0000E+03  0.0000E+00
175000.E-01  3.2000E+03  0.0000E+00
177500.E-01  3.6000E+03  0.0000E+00
180000.E-01  1.6000E+03  0.0000E+00
182500.E-01  8.0000E+02  0.0000E+00
185000.E-01  4.0000E+02  0.0000E+00
187500.E-01  4.0000E+02  0.0000E+00
190000.E-01  0.0000E+00  0.0000E+00
192500.E-01  0.0000E+00  0.0000E+00
195000.E-01  0.0000E+00  0.0000E+00
197500.E-01  0.0000E+00  0.0000E+00
200000.E-01  0.0000E+00  0.0000E+00
202500.E-01  0.0000E+00  0.0000E+00
205000.E-01  0.0000E+00  0.0000E+00
207500.E-01  0.0000E+00  0.0000E+00
210000.E-01  0.0000E+00  0.0000E+00
212500.E-01  0.0000E+00  0.0000E+00
215000.E-01  0.0000E+00  0.0000E+00
217500.E-01  0.0000E+00  0.0000E+00
220000.E-01  0.0000E+00  0.0000E+00
222500.E-01  0.0000E+00  0.0000E+00
225000.E-01  0.0000E+00  0.0000E+00
227500.E-01  0.0000E+00  0.0000E+00
230000.E-01  0.0000E+00  0.0000E+00
232500.E-01  0.0000E+00  0.0000E+00
235000.E-01  0.0000E+00  0.0000E+00
237500.E-01  0.0000E+00  0.0000E+00
240000.E-01  0.0000E+00  0.0000E+00
242500.E-01  0.0000E+00  0.0000E+00
245000.E-01  0.0000E+00  0.0000E+00
247500.E-01  0.0000E+00  0.0000E+00
250000.E-01  0.0000E+00  0.0000E+00
